| SURFIEW 500 | ||
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Semiconductor
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PCB
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Display
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その他 
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Specification
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Vertical Resolution
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VSI,VEI < 0.5nm, VPI < 0.1nm
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Lateral Resolution
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0.05~7.2um(Depends on magnification)
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Height Repeatability
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≤0.3% @ 1σ
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Objective Lens
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1 Selectable(Manual)
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Zoom Lens
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1 Selectable(1.0x @ Manual)
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Camera Format
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1/2" Mono Camera
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Scan Method
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Piezo Actuator @ SGS Closed loop
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PZT Scan Range
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≤100um
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Scan Speed
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7.5um/sec(1x) / 22.5um/sec(3x)
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Illumination
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White LED
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Filter
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Visible/Bandpass Filter(Manual)
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X/Y Axis Stroke
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25mm(X) x 13mm(Y)
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Z Aixs Stroke
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13mm
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Tilt Aixs Stroke
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± 2°
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Work Table Size
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80mm X 80mm
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Max Workpiece Load
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≤ 1kg
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Layout Size
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1100mm(W) x 700mm(D) x 1450mm(H)
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Software
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Surface View/Surface MAP@ Window10 (64bit)
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Stitching
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NO
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Vibration Isolation Platform
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Passive Type(Vertical Resonance: 2.5Hz)
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Input Power
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2∮,110V/220V(±10%), 50/60Hz
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Option
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Interference Lens
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2.5x, 5.0x, 10x, 20x, 50x, 100x
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Objective Lens
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2.5x, 5.0x, 10x, 20x, 50x, 100x
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Zoom Lens
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0.55x, 0.75x, 1.0x, 1.5x, 2.0x
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PZT Scan Range
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≤250um
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Camera Format
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2/3" or 1" Mono Camera
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Work Table
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Vacuum Table, Rotation Table
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